Free Access
Issue
Microsc. Microanal. Microstruct.
Volume 1, Number 2, April 1990
Page(s) 159 - 163
DOI https://doi.org/10.1051/mmm:0199000102015900
Microsc. Microanal. Microstruct. 1, 159-163 (1990)
DOI: 10.1051/mmm:0199000102015900

The HF-2000, a cold field emission transmission electron microscope

S. Isakozawa1, Y. Kashikura1, Y. Sato1, T. Takahashi1, M. Ichihashi2 et H. Murakoshi2

1  Naka Works, Hitachi, Ltd., Katsuta, Ibaraki 312, Japan
2  Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo, 185, Japan

Without abstract


PACS
0778 - Electron, positron, and ion microscopes; electron diffractometers.
7970 - Field emission, ionization, evaporation, and desorption.

Key words
Scanning electron microscopes -- Cold source -- Instrumentation -- Electron field emission -- Radiation sources


© EDP Sciences 1990

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