Free Access
Issue
Microsc. Microanal. Microstruct.
Volume 1, Number 3, June 1990
Page(s) 189 - 197
DOI https://doi.org/10.1051/mmm:0199000103018900
Microsc. Microanal. Microstruct. 1, 189-197 (1990)
DOI: 10.1051/mmm:0199000103018900

Study of epitaxial films of Ag, Pd and AgPd deposited by dc sputtering

François Reniers, Paule Kons, Pierre Delcambe, Lucien Binst, Marcelle Jardinier-Offergeld et Florent Bouillon

Laboratoire de Chimie Analytique, Paculté des Sciences, C. P. 160, Université Libre de Bruxelles, 50 avenue F. D. Roosevelt, 1050 Bruxelles, Belgium


Abstract
The experimental conditions to condense epitaxial films of silver, palladium and silver-palladium alloys onto (100) air-cleaved MgO faces by glow discharge sputtering are related. The orientation (100)d//(100)s (where d indicates deposit and s substrate) is observed for the two last systems. The films are characterized by THEED, RHEED, SAD, TEM and AES. The bulk composition of the alloys is determined by ICP. The surface purity of the condensed films is examined and discussed.


Résumé
Nous décrivons les conditions de préparation de films minces épitaxiques d'argent, de palladium et d'alliages argent-palladium déposés sur des faces (100) de MgO par pulvérisation cathodique. L'orientation parallèle (100)d//(100)s (d pour dépôt et s pour substrat) est observée pour les deux derniers systèmes. Les films sont caractérisés par THEED, RHEED, SAD, TEM et AES. La composition massive des alliages est déterrninée par ICP. La pureté superficielle des films condensés est étudiée et discutée.

PACS
6855J - Structure and morphology; thickness; crystalline orientation and texture.

Key words
Thin films -- Epitaxial layers -- Electron diffraction -- RHEED -- SAED -- TEM -- AES -- Chemical composition -- Characterization -- Silver alloys -- Palladium alloys -- Experimental study


© EDP Sciences 1990

Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.

Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.

Initial download of the metrics may take a while.