Free Access
Issue
Microsc. Microanal. Microstruct.
Volume 1, Number 3, June 1990
Page(s) 233 - 240
DOI https://doi.org/10.1051/mmm:0199000103023300
Microsc. Microanal. Microstruct. 1, 233-240 (1990)
DOI: 10.1051/mmm:0199000103023300

Development of a 300 kV ultrahigh resolution analytical electron microscope

Yoshihiro Arai1, Kurio Fukushima1, Yasushi Kokubo1 et Alain Michot2

1  JEOL Ltd., 1-2 Musashino 3-chome Akishima Tokyo 196, Japan
2  JEOL S.A., 16, Avenue de Colmar, 92500 Rueil-Malmaison, France

Without abstract


PACS
0778 - Electron, positron, and ion microscopes; electron diffractometers.

Key words
Analytical electron microscopy -- High-resolution methods -- Instrumentation -- Optical lens -- Goniometers -- Vacuum systems


© EDP Sciences 1990

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