Free Access
Issue
Microsc. Microanal. Microstruct.
Volume 1, Number 4, August 1990
Page(s) 267 - 274
DOI https://doi.org/10.1051/mmm:0199000104026700
Microsc. Microanal. Microstruct. 1, 267-274 (1990)
DOI: 10.1051/mmm:0199000104026700

Comportement thermique de films minces de verres GeSey

Michèle Dubourg1, Bernard Cros2, Michel Ribes2, Jean-Paul Martinez1 et Jean-Louis Balladore1

1  Centre d'Elaboration de Matériaux et d'Etudes Structurales, Laboratoire d'Optique Electronique - CNRS, 29 rue Jeanne Marvig, 31055 Toulouse Cedex, France
2  Laboratoire de Physicochimie des Matériaux Solides, USTL, place E. Bataillon, 34095 Montpellier Cedex 5, France


Abstract
Thin films of chalcogenide glasses GeSey were prepared by PECVD for lithographic application. Their morphology at different temperatures is observed by electron microscopy. Their local composition is evaluated by X analysis.


Résumé
Des films minces de verres de chalcogénure GeSey ont été préparés par PECVD en vue d'applications pour la lithographie. Leur morphologie à différentes températures est observée par microscopie électronique. Leur composition locale est évaluée par analyse X.

PACS
6855J - Structure and morphology; thickness; crystalline orientation and texture.

Key words
Microstructure -- Temperature effects -- Concentration distribution -- XRD -- Electron diffraction -- Structural analysis -- Crystallization -- Chalcogenide glasses -- Germanium selenides -- Thin films -- Experimental study


© EDP Sciences 1990

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