Microsc. Microanal. Microstruct. 8, 393-402 (1997)
DOI: 10.1051/mmm:1997130

A Scanning Force Microscope Combined with a Scanning Electron Microscope for Multidimensional Data Analysis

Michel Troyon¹, Hei Ning Lei¹, Zhonghuai Wang¹ et Guangyi Shang<sup>2

1</sup>  Unité de Thermique et Analyse Physique, Laboratoire de Microscopies Électronique et Tunnel, 21 rue Clément Ader, 51685 Reims Cedex 2, France
²  STM Laboratory, Institute of Chemistry, Chinese Academy of Sciences, Beijing 100080, China

Abstract
A Scanning Force Microscope (SFM) intended for operation inside a Scanning Electron Microscope (SEM) is described. This combined instrument allows one to image a sample conventionally by SEM and to investigate by SFM the local topography as well as certain physical characteristics of the surface (friction, elasticity...). The combination of the two microscopes is very attractive because they complement each other in terms of depth of field, lateral and vertical resolution, field of view, speed and ability to image insulating surfaces. A multidimensional data space relative to the same area of a sample surface can be constructed, which should help to give new insights into the nature of materials.

PACS
0780 - Electron and ion microscopes and techniques.
6116P - Scanning probe microscopy determinations of structures.
6820 - Solid surface structure.
6116D - Electron microscopy determinations of structures.

Key words
atomic force microscopy -- scanning electron microscopes -- scanning electron microscopy -- surface topography -- scanning force microscope -- SEM -- local topography -- friction -- elasticity -- depth of field -- vertical resolution -- lateral resolution -- field of view -- insulating surfaces -- multidimensional data analysis


© EDP Sciences 1997