Free Access
Microsc. Microanal. Microstruct.
Volume 2, Number 2-3, April / June 1991
Page(s) 257 - 267
Microsc. Microanal. Microstruct. 2, 257-267 (1991)
DOI: 10.1051/mmm:0199100202-3025700

EELS quantification near the single-atom detection level

Ondrej L. Krivanek, Claudie Mory, Marcel Tence et Christian Colliex

Laboratoire de Physique des Solides, Bâtiment 510, Université Paris-Sud, 91405 Orsay, France

Parallel-detection electron energy loss spectrometers are able to detect the EELS signal originating from only a few atoms on thin substrates. The instrumental requirements for attaining this level of performance, and the methodology for quantifying the results are described. For the case of small thorium clusters on a thin carbon film, the detection limit with currently available instrumentation is shown to be one atom.

0705K - Data analysis: algorithms and implementation; data management.
0781 - Electron and ion spectrometers.
7890 - Other topics in optical properties, condensed matter spectroscopy and other interactions of particles and radiation with condensed matter.
8280 - Chemical analysis and related physical methods of analysis.

Key words
EEL spectroscopy -- Single atom -- Thorium -- Cluster -- Thin films -- Carbon -- Thorium clusters

© EDP Sciences 1991