Microsc. Microanal. Microstruct.
Volume 6, Number 5-6, October / December 1995
|Page(s)||513 - 522|
The Cylindrical Envelope Projection Model Applied to SE Images of Curved Surfaces and Comparison with AFM EvaluationsMassimo Antognozzi et Ugo Valdrè
Centre for Electron Microscopy, Department of Physics and INFM-CNR, via Irnerio 46, 40126 Bologna, Italy
The Cylindrical Envelope Projection Model (CEPM) has been extended to images of curved objects (e.g., spheres), obtained in a SEM by means of SEs, in order to improve the accuracy of measurements (down to a few %). The test objects have been calibrated by means of an AFM equipped with home-made nanotips. A simple rule for measuring the diameter of spheres and cylinders from SE y-modulated traces is given. The rule is applicable to specimens of medium and high atomic number.
7920H - Electron surface impact: secondary emission.
6116D - Electron microscopy determinations of structures.
6116P - Scanning probe microscopy determinations of structures.
6820 - Solid surface structure.
atomic force microscopy -- scanning electron microscopy -- secondary electron emission -- cylindrical envelope projection model -- curved surfaces -- spheres -- SEM -- AFM -- y modulated traces -- secondary electron images
© EDP Sciences 1995