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All issues Volume 6 / No 5-6 (October / December 1995) Microsc. Microanal. Microstruct., 6 5-6 (1995) 513-522 Abstract
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Issue
Microsc. Microanal. Microstruct.
Volume 6, Number 5-6, October / December 1995
Page(s) 513 - 522
DOI https://doi.org/10.1051/mmm:1995143
Microsc. Microanal. Microstruct. 6, 513-522 (1995)
DOI: 10.1051/mmm:1995143

The Cylindrical Envelope Projection Model Applied to SE Images of Curved Surfaces and Comparison with AFM Evaluations

Massimo Antognozzi et Ugo Valdrè

Centre for Electron Microscopy, Department of Physics and INFM-CNR, via Irnerio 46, 40126 Bologna, Italy


Abstract
The Cylindrical Envelope Projection Model (CEPM) has been extended to images of curved objects (e.g., spheres), obtained in a SEM by means of SEs, in order to improve the accuracy of measurements (down to a few %). The test objects have been calibrated by means of an AFM equipped with home-made nanotips. A simple rule for measuring the diameter of spheres and cylinders from SE y-modulated traces is given. The rule is applicable to specimens of medium $(Z\geq 25)$ and high atomic number.

PACS
7920H - Electron surface impact: secondary emission.
6116D - Electron microscopy determinations of structures.
6116P - Scanning probe microscopy determinations of structures.
6820 - Solid surface structure.

Key words
atomic force microscopy -- scanning electron microscopy -- secondary electron emission -- cylindrical envelope projection model -- curved surfaces -- spheres -- SEM -- AFM -- y modulated traces -- secondary electron images


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