Free Access
| Issue |
Microsc. Microanal. Microstruct.
Volume 7, Number 3, June 1996
|
|
|---|---|---|
| Page(s) | 205 - 205 | |
| DOI | https://doi.org/10.1051/mmm:0199600703020500 | |
Microsc. Microanal. Microstruct. 7, 205-205 (1996)
DOI: 10.1051/mmm:0199600703020500
Université des Sciences et Technologies de Lille
PACS
0130C - Conference proceedings.
6172 - Defects and impurities in crystals; microstructure.
Key words
Proceedings -- Defect detection -- Image processing -- Semiconductor materials -- Scanning probe microscopy -- Electron microscopy -- Optical microscopy
© EDP Sciences 1996
DOI: 10.1051/mmm:0199600703020500
Defect Recognition and Image Processing in Semiconductors 1995 A.R. Mickelson Ed. Institute of Physics Conference Series, Number 149 (Institute of Physics Publishing, Bristol and Philadelphia
Brigitte SieberUniversité des Sciences et Technologies de Lille
Without abstract
PACS
0130C - Conference proceedings.
6172 - Defects and impurities in crystals; microstructure.
Key words
Proceedings -- Defect detection -- Image processing -- Semiconductor materials -- Scanning probe microscopy -- Electron microscopy -- Optical microscopy
© EDP Sciences 1996
First page of the article
