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Solutions to a proximity effect in high resolution electron beam induced deposition
W. F. van Dorp, S. Lazar, C. W. Hagen and P. Kruit Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 25(5) 1603 (2007) https://doi.org/10.1116/1.2775456
Electron-Beam-Induced Nanometer-Scale Deposition
Natalia Silvis-Cividjian and Cornelis W. Hagen Advances in Imaging and Electron Physics, Electron-Beam-Induced Nanometer-Scale Deposition 143 1 (2006) https://doi.org/10.1016/S1076-5670(06)43001-9
Comparison of FIB-CVD and EB-CVD growth characteristics
Periodic structure formation by focused electron-beam-induced deposition
T. Bret, I. Utke, C. Gaillard and P. Hoffmann Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 22(5) 2504 (2004) https://doi.org/10.1116/1.1800356
Focused ion beam-induced fabrication of tungsten structures
M. Ishida, J. Fujita, T. Ichihashi, Y. Ochiai, T. Kaito and S. Matsui Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 21(6) 2728 (2003) https://doi.org/10.1116/1.1627806
Nanofabrication of electrodes with sub-5 nm spacing for transport experiments on single molecules and metal clusters
A. Bezryadin and C. Dekker Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 15(4) 793 (1997) https://doi.org/10.1116/1.589411
Electron‐beam‐induced fabrication of metal‐containing nanostructures