Structural and analytical characterization of Si1-x Gex /Si heterostructures by Rutherford backscattering spectrometry and channeling, analytical electron microscopy and double crystal X-ray diffractometry
Microsc. Microanal. Microstruct., 3 4 (1992) 363-384
DOI: https://doi.org/10.1051/mmm:0199200304036300