Implantation of gold atoms into silicon by MeV electron irradiation Hirotaro Mori, Takao Sakata, Masao Komatsu and Hidehiro YasudaMicrosc. Microanal. Microstruct., 4 2-3 (1993) 137-142DOI: https://doi.org/10.1051/mmm:0199300402-3013700