Strain Relaxation of Si/Ge Multilayers Investigated by Transmission Electron Microscopy and High-Resolution X-Ray Diffractometry Elvio Carlino, Cinzia Giannini, Leander Tapfer, Kurt A. Mäder and Hans von KänelMicrosc. Microanal. Microstruct., 6 5-6 (1995) 473-482DOI: https://doi.org/10.1051/mmm:1995138