Microscopy Microanalysis Microstructures

Epitaxial orientation of β-FeSi2/Si heterojunctions obtained by RTP chemical vapor deposition

I. Berbezier, J.L. Regolini and C. d'Anterroches

Microsc. Microanal. Microstruct., 4 1 (1993) 5-21

DOI: 10.1051/mmm:01993004010500

I. Berbezier

J.L. Regolini

C. d'Anterroches

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