Microscopy Microanalysis Microstructures

Observation of Al-lines in LSI devices by ultra-high voltage electron microscope

Akio Takaoka, Noriyuki Okaya and Katsumi Ura

Microsc. Microanal. Microstruct., 4 2-3 (1993) 239-247

DOI: 10.1051/mmm:0199300402-3023900

Akio Takaoka

Noriyuki Okaya

Katsumi Ura

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