Microscopy Microanalysis Microstructures

3D statistics from TEM observations of TPFG EEPROM memory cells

Paolo Mengucci, Daniele Rinaldi, Stefano Santini and Massimo Vanzi

Microsc. Microanal. Microstruct., 1 3 (1990) 215-231

DOI: 10.1051/mmm:0199000103021500

Paolo Mengucci

Daniele Rinaldi

Stefano Santini

Massimo Vanzi

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