Free Access
| Issue |
Microsc. Microanal. Microstruct.
Volume 1, Number 2, April 1990
|
|
|---|---|---|
| Page(s) | 159 - 163 | |
| DOI | https://doi.org/10.1051/mmm:0199000102015900 | |
Microsc. Microanal. Microstruct. 1, 159-163 (1990)
DOI: 10.1051/mmm:0199000102015900
1 Naka Works, Hitachi, Ltd., Katsuta, Ibaraki 312, Japan
2 Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo, 185, Japan
PACS
0778 - Electron, positron, and ion microscopes; electron diffractometers.
7970 - Field emission, ionization, evaporation, and desorption.
Key words
Scanning electron microscopes -- Cold source -- Instrumentation -- Electron field emission -- Radiation sources
© EDP Sciences 1990
DOI: 10.1051/mmm:0199000102015900
The HF-2000, a cold field emission transmission electron microscope
S. Isakozawa1, Y. Kashikura1, Y. Sato1, T. Takahashi1, M. Ichihashi2 et H. Murakoshi21 Naka Works, Hitachi, Ltd., Katsuta, Ibaraki 312, Japan
2 Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo, 185, Japan
Without abstract
PACS
0778 - Electron, positron, and ion microscopes; electron diffractometers.
7970 - Field emission, ionization, evaporation, and desorption.
Key words
Scanning electron microscopes -- Cold source -- Instrumentation -- Electron field emission -- Radiation sources
© EDP Sciences 1990
First page of the article
