Free Access
Microsc. Microanal. Microstruct.
Volume 5, Number 2, April 1994
Page(s) 153 - 164
Microsc. Microanal. Microstruct. 5, 153-164 (1994)
DOI: 10.1051/mmm:0199400502015300

Medium-voltage field-emission STEM - the ultimate AEM

H.S. von Harrach

VG Microscopes, Fisons Instruments, East Grinstead RH19 1UB, U.K.

100 kV cold field-emission STEMs have achieved microanalysis of materials at the nanometre level in recent years. 300 kV STEMs have now been developed to improve the analytical capabilities towards the ultimate goal of atomic sensitivity. The HB603 cold field-emission (CFE) STEMs were optimised for analytical microscopy and results at 300 kV show an improvement in X-ray peak-to-background ratio by a factor of 2, and an EELS resolution of 0.4 eV In the Z-contrast imaging mode the high-resolution instrument (HB603U) achieves a point resolution of 0.13nm.

8170J - Chemical composition analysis, chemical depth and dopant profiling.
0778 - Electron, positron, and ion microscopes; electron diffractometers.

Key words
STEM -- Electron microscopy -- Field emission -- Analytical electron microscopy -- Electron microscopes -- Microanalysis -- X radiation -- EEL spectroscopy -- Energy-loss spectroscopy -- Instrumentation -- Metrology -- Physics

© EDP Sciences 1994