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Cited article:

Mechanical Properties of Optical Dielectric Thin Films Deposited by the Ion Plating Technique

Christine Mahodaux, Hervé Rigneault, Hugues Giovannini, Ludovic Escoubas, Paul Morreti

Microsc. Microanal. Microstruct., 8 4-5 (1997) 251-260

DOI: https://doi.org/10.1051/mmm:1997120

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Effects of Annealing on the Mechanical and Electrical Properties of DC Sputtered Tantalum Pentoxide (Ta2O5) Thin Films

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Electrical and mechanical properties of ion-plated copper metallization on dielectric substrates

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