Microscopy Microanalysis Microstructures

Structure and properties of rf magnetron sputtered W films

Marie-Christine Hugon, Chantal Arena, Bernard Agius, Michel Froment, Françoise Varniere and Colette Vignaud

Microsc. Microanal. Microstruct., 1 3 (1990) 175-187

DOI: 10.1051/mmm:0199000103017500

Marie-Christine Hugon

Chantal Arena

Bernard Agius

Michel Froment

Françoise Varniere

Colette Vignaud

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