Microscopy Microanalysis Microstructures

New fast chemically assisted ion beam etching (CAIBE) technique for preparation of TEM specimen from silicon

Lalit Mohan Bharadwaj, Joël Faure, Pierre Bonhomme and Gérard Balossier

Microsc. Microanal. Microstruct., 2 1 (1991) 89-96

DOI: 10.1051/mmm:019910020108900

Lalit Mohan Bharadwaj

Joël Faure

Pierre Bonhomme

Gérard Balossier

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