Microscopy Microanalysis Microstructures

Implantation of gold atoms into silicon by MeV electron irradiation

Hirotaro Mori, Takao Sakata, Masao Komatsu and Hidehiro Yasuda

Microsc. Microanal. Microstruct., 4 2-3 (1993) 137-142

DOI: 10.1051/mmm:0199300402-3013700

Hirotaro Mori

Takao Sakata

Masao Komatsu

Hidehiro Yasuda

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