Microscopy Microanalysis Microstructures

Characterization of W Films on Si and SiO2/Si Substrates by X-Ray Diffraction, AFM and Blister Test Adhesion Measurements

Alain Bosseboeuf, Michel Dupeux, Mathilde Boutry, Tarik Bourouina, Daniel Bouchier and Dominique Débarre

Microsc. Microanal. Microstruct., 8 4-5 (1997) 261-272

DOI: 10.1051/mmm:0199700804-5026100

Alain Bosseboeuf

Michel Dupeux

Mathilde Boutry

Tarik Bourouina

Daniel Bouchier

Dominique Débarre

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