Lattice Electron Microscopy and Image Processing of Ion-Implanted and Laser-Annealed GaAs Structures Gianfranco Vitali, Marco Rossi, Giuseppe Zollo, Cesare Pizzuto, Nikolai Pashov and Maria Kalitzova Microsc. Microanal. Microstruct., 6 5-6 (1995) 483-490 DOI: 10.1051/mmm:1995139