New fast chemically assisted ion beam etching (CAIBE) technique for preparation of TEM specimen from silicon Lalit Mohan Bharadwaj, Joël Faure, Pierre Bonhomme and Gérard Balossier Microsc. Microanal. Microstruct., 2 1 (1991) 89-96 DOI: 10.1051/mmm:019910020108900