Microscopy Microanalysis Microstructures

Resolution of Semiconductor Multilayers using Backscattered Electrons in Scanning Electron Microscopy

Donato Govoni, Pier Giorgio Merli, Andrea Migliori and Michele Nacucchi

Microsc. Microanal. Microstruct., 6 5-6 (1995) 499-504

DOI: 10.1051/mmm:1995141

Donato Govoni

Pier Giorgio Merli

Andrea Migliori

Michele Nacucchi

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