Depth Profiles of Al/Mn/Si Multilayers Chrystel Hombourger, Philippe Jonnard, Christiane Bonnelle, Eric Beauprez, Marc Spirckel, Béatrice Feltz, Dominique Boutard and Jean-Paul Gallien Microsc. Microanal. Microstruct., 8 4-5 (1997) 287-300 DOI: 10.1051/mmm:1997122