Microsc. Microanal. Microstruct. 2, 413-423 (1991)
DOI: 10.1051/mmm:0199100204041300

A characteristic fluorescence correction factor for use in electron probe microanalysis. I. Theory

Christian Schiebl¹, Hans-Jürgen August² et Johann Wernisch<sup>2

1</sup>  Digital Equipment Corp., Campus-based Engineering Center, Favoritenstr. 7, A-1040 Wien (Vienna), Austria
²  Institut für Angewandte und Technische Physik, Technische Universität Wien, Wiedner Hauptstr. 8-10, A-1040 Wien (Vienna), Austria

Abstract
A rigorous derivation of the characteristic fluorescence correction factor for use in electron probe microanalysis is presented. To achieve a high accuracy of the resulting expression Coster-Kronig transitions and effective fluorescence yields are taken into account and special attention is directed to the excitation conditions, e.g. the subshell structures. The integrations are carried out as accurately as possible, i.e. analytical solutions are employed if possible. Approximation and simplifications are avoided as far as possible.

PACS
8280D - Analytical methods involving electronic spectroscopy.
7870E - X-ray emission spectra and fluorescence.

Key words
Microanalysis -- Electron probe analysis -- Fluorescence -- Secondary emission -- Correction factor -- Inner-shell ionization -- Coster-Kronig transitions -- Fluorescence yield -- Homogeneous material


© EDP Sciences 1991