Microsc. Microanal. Microstruct. 2, 425-442 (1991)
DOI: 10.1051/mmm:0199100204042500

A characteristic fluorescence correction factor for use in electron probe microanalysis. II. Evaluation of experimental results and comparisons

Christian Schiebl¹, Hans-Jürgen August et Johann Wernisch<sup>2

1</sup>  Digital Equipment Corp., Campus-based Engineering Center, Favoritenstr. 7, A-1040 Wien (Vienna), Austria
²  Institute für Angewandte und Technische Physik, Technische Universität Wien, Wiedner Hauptstr. 8-10, A-1040 Wien (Vienna), Austria

Abstract
A comparison of a recently published secondary characteristic fluorescence correction method especially with the in electron probe microanalysis commonly used Reed procedure is presented along with evaluations of experimental data from literature taking into account the fluorescence correction using the new model. Special attention is directed to the choice of fundamental parameters, such as mass absorption coefficients, fluorescence yields, relative intensities and ionization cross sections, which are found to influence the corresponding results considerably.

PACS
8280D - Analytical methods involving electronic spectroscopy.
7870E - X-ray emission spectra and fluorescence.

Key words
Microanalysis -- Electron probe analysis -- Fluorescence -- Correction factor -- Secondary emission -- Fluorescence yield -- Relative intensity -- Photoionization


© EDP Sciences 1991