Free Access
| Issue |
Microsc. Microanal. Microstruct.
Volume 7, Number 1, February 1996
|
|
|---|---|---|
| Page(s) | 17 - 25 | |
| DOI | https://doi.org/10.1051/mmm:1996104 | |
Microsc. Microanal. Microstruct. 7, 17-25 (1996)
DOI: 10.1051/mmm:1996104
Inclusions in Magnetron Sputtered
YBa2Cu3-xMxO
Karen Verbist1, Gustaaf Van Tendeloo1, Min Ye2, Jeannot Schroeder2, Mohammad Mehbod2 et Robert Deltour2
1 EMAT, University of Antwerp (R.U.C.A.), Groenenborgerlaan 171, 2020 Antwerpen, Belgium
2 Physique des Solides, CP-233, Université Libre de Bruxelles, Boulevard du triomphe, 1050 Bruxelles, Belgium
6170Q - Inclusions and voids.
7470V - Perovskite phase superconductors.
6480E - Stoichiometry and homogeneity.
6475 - Solubility, segregation, and mixing.
7475 - Superconducting films.
6480G - Microstructure.
Key words
barium compounds -- crystal microstructure -- high temperature superconductors -- inclusions -- precipitation -- sputtered coatings -- stoichiometry -- superconducting thin films -- transmission electron microscopy -- yttrium compounds -- high temperature superconductivity -- nanoscale inclusions -- stoichiometry -- TEM -- microstructure -- thin films -- inverted cylindrical magnetron sputtering -- electron microscopy -- precipitates -- substitution -- YBa sub 2 Cu sub 3 x Zn sub x O sub 7 delta :Y sub 2 O sub 3 -- YBa sub 2 Cu sub 3 x Fe sub x O sub 7 delta :Y sub 2 O sub 3 -- YBa sub 2 Cu sub 3 O sub 7 delta :Y sub 2 O sub 3
© EDP Sciences 1996
DOI: 10.1051/mmm:1996104
Inclusions in Magnetron Sputtered
YBa2Cu3-xMxO
Thin Films:
A Study by Means of Electron Microscopy
Karen Verbist1, Gustaaf Van Tendeloo1, Min Ye2, Jeannot Schroeder2, Mohammad Mehbod2 et Robert Deltour2 1 EMAT, University of Antwerp (R.U.C.A.), Groenenborgerlaan 171, 2020 Antwerpen, Belgium
2 Physique des Solides, CP-233, Université Libre de Bruxelles, Boulevard du triomphe, 1050 Bruxelles, Belgium
Abstract
The microstructure of (001)
and
(M = Zn or Fe) thin films grown by inverted cylindrical magnetron
sputtering was investigated by means of electron microscopy. The
imperfections present in the films are discussed. Special attention is paid
to nanoscale
inclusions. The density of [001]
precipitates was
studied in
and
thin films
prepared under identical conditions. The density decreases for increasing
Zn-content and is unaffected in case of Fe-substitution.
6170Q - Inclusions and voids.
7470V - Perovskite phase superconductors.
6480E - Stoichiometry and homogeneity.
6475 - Solubility, segregation, and mixing.
7475 - Superconducting films.
6480G - Microstructure.
Key words
barium compounds -- crystal microstructure -- high temperature superconductors -- inclusions -- precipitation -- sputtered coatings -- stoichiometry -- superconducting thin films -- transmission electron microscopy -- yttrium compounds -- high temperature superconductivity -- nanoscale inclusions -- stoichiometry -- TEM -- microstructure -- thin films -- inverted cylindrical magnetron sputtering -- electron microscopy -- precipitates -- substitution -- YBa sub 2 Cu sub 3 x Zn sub x O sub 7 delta :Y sub 2 O sub 3 -- YBa sub 2 Cu sub 3 x Fe sub x O sub 7 delta :Y sub 2 O sub 3 -- YBa sub 2 Cu sub 3 O sub 7 delta :Y sub 2 O sub 3
© EDP Sciences 1996