Issue |
Microsc. Microanal. Microstruct.
Volume 7, Number 3, June 1996
|
|
---|---|---|
Page(s) | 161 - 174 | |
DOI | https://doi.org/10.1051/mmm:1996112 |
DOI: 10.1051/mmm:1996112
Spatially Resolved EELS Fine Structures
at a
Interface
Nathalie Brun1, Christian Colliex1, Josette Rivory2 et Yu-Zhang Kui3 1 Laboratoire de Physique des Solides, URA CNRS 002, Université Paris-Sud, Bât. 510, 91405 Orsay Cedex, France
2 Laboratoire d'Optique des Solides, URA CNRS 781, Université P. et M. Curie, 4 Place Jussieu, Tour 13-12, 75252 Paris Cedex 05, France
3 Laboratoire de Reconnaissance des Matériaux dans leur Environnement, Université Marne-la-Vallée, 2 rue de la Butte Verte, 93166 Noisy-le-Grand Cedex, France
Abstract
multilayers stacks used in optical coatings have been
studied by Electron Energy Loss Spectroscopy (EELS). The
line-spec trum mode has been used: the incident electron probe of
the STEM is scanned under digital control on the specimen
surface in the direction perpendicular to the layers, while the
whole spectrum is acquired. The selected energy range contains
Ti
and O K edges, in order to study the evolution of the
fine structures visible on these edges. Every experimental
spectrum is then fitted with a linear combination of the two
reference spectra (
and
) extracted from the same
sequence. It is possible to identify in the neighbourhood of the
interface some EELS fine structures which cannot be fitted to a
combination of reference spectra, but are representative of
hybrid environments, such as Si-O-Ti in the present study. A
quantitative analysis of the changes in different fine
structures on the titanium and oxygen edges enables to clearly
discriminate different levels of interdiffusion at the boundary.
6848 - Solid solid interfaces.
6822 - Surface diffusion, segregation and interfacial compound formation.
Key words
chemical interdiffusion -- electron energy loss spectra -- interface structure -- scanning transmission electron microscopy -- silicon compounds -- surface diffusion -- titanium compounds -- spatially resolved EELS fine structures -- SiO sub 2 TiO sub 2 interface -- multilayers stacks -- optical coatings -- line spectrum mode -- incident electron probe -- STEM -- interdiffusion -- SiO sub 2 TiO sub 2
© EDP Sciences 1996