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Amorphization and crystallization in high-dose Zn+-implanted silicon

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Journal of Applied Physics 81 (3) 1143 (1997)
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High‐dose phenomena in zinc‐implanted silicon crystals

S. Simov, M. Kalitzova, D. Karpuzov, et al.
Journal of Applied Physics 79 (7) 3470 (1996)
DOI: 10.1063/1.361395
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C. Angelov and P. Groudev
233 (2001)
DOI: 10.1109/IVMC.2001.939739
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