Microsc. Microanal. Microstruct. 2, 215-230 (1991)
DOI: 10.1051/mmm:0199100202-3021500

Determination of inner-shell cross-sections for EELS-quantification

Ferdinand Hofer

Forschungsinstitut für Elektronenmikroskopie und Feinstrukturforschung, Graz University of Technology, A-8010 Graz, Austria

Abstract
Quantitative microanalysis using the EELS technique requires the knowledge of partial scattering cross-sections to relate the measured intensities to the concentrations in the compounds. Partial scattering cross-sections can be determined either theoretically or empirically by means of standards. Cross-sections for K, L23 and M45 ionization edges can be calculated by the hydrogenic model and by the Hartree-Slater-model and with these models elements ranging from Li to W can be quantified. Alternatively, the ratio of two cross-sections (k-factor) can be used for quantification. These k-factors can be determined by measuring the appropriate ionization edges using a thin film standard, which has been done for K, L23, M45 and N45-edges. Scattering cross-sections which have been determined by these methods are compared and their impact on the reliability and accuracy of EELS-quantification is critically discussed.

PACS
0705K - Data analysis: algorithms and implementation; data management.
0781 - Electron and ion spectrometers.
7870 - Interactions of particles and radiation with matter.

Key words
EEL spectroscopy -- Partial cross section -- Scattering spectrometry -- Hartree Slater theory -- Lithium -- Manganese -- Iron oxides -- Hydrogenic model -- Ionization edge


© EDP Sciences 1991