Microsc. Microanal. Microstruct.
Volume 3, Number 2-3, April / June 1992
|Page(s)||119 - 139|
Microscope imaging by time-of-flight secondary ion mass spectrometryBruno W. Schueler
Charles Evans & Associates, 301 Chesapeake Drive, Redwood City, CA 94063, U.S.A.
The concept of Secondary Ion Microscopy, introduced by Castaing et al. , is applied to a direct imaging time-of-flight (TOF) mass spectrometer. The ion optical configuration for a particular  stigmatic imaging TOF mass spectrometer is reviewed. A number of fundamental factors influencing the mass resolution in any TOF spectrometer are discussed. The question of where microscope imaging offers advantages over microprobe imaging in TOF Secondary Ion Mass Spectrometry is addressed.
0775 - Mass spectrometers.
8280M - Mass spectrometry (including SIMS, multiphoton ionization and resonance ionization mass spectrometry, MALDI).
4230 - Imaging and optical processing.
Time of flight mass spectroscopy -- Secondary ion mass spectrometry -- Ion microscopes -- Ion optics -- Secondary ion emission -- Image resolution -- Surface analysis
© EDP Sciences 1992