Microsc. Microanal. Microstruct. 3, 119-139 (1992)
DOI: 10.1051/mmm:0199200302-3011900

Microscope imaging by time-of-flight secondary ion mass spectrometry

Bruno W. Schueler

Charles Evans & Associates, 301 Chesapeake Drive, Redwood City, CA 94063, U.S.A.

Abstract
The concept of Secondary Ion Microscopy, introduced by Castaing et al. [1], is applied to a direct imaging time-of-flight (TOF) mass spectrometer. The ion optical configuration for a particular [2] stigmatic imaging TOF mass spectrometer is reviewed. A number of fundamental factors influencing the mass resolution in any TOF spectrometer are discussed. The question of where microscope imaging offers advantages over microprobe imaging in TOF Secondary Ion Mass Spectrometry is addressed.

PACS
0775 - Mass spectrometers.
8280M - Mass spectrometry (including SIMS, multiphoton ionization and resonance ionization mass spectrometry, MALDI).
4230 - Imaging and optical processing.

Key words
Time of flight mass spectroscopy -- Secondary ion mass spectrometry -- Ion microscopes -- Ion optics -- Secondary ion emission -- Image resolution -- Surface analysis


© EDP Sciences 1992