Microsc. Microanal. Microstruct. 3, 323-331 (1992)
DOI: 10.1051/mmm:0199200304032300

Direct electron-beam-induced formation of nanometer-scale carbon structures in STEM. - II. The growth of rods outside the substrate

Nikolai A. Kislov et Igor I. Khodos

Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, 142432, Chernogolovka, Moscow District, Russia

Abstract
Electron-beam-induced growth of self-supporting carbon-containing rods outside the substrate has been investigated. The influence of the beam current in the range of 1 to 80 pA on the shape and dimensions of the rods has been determined. Differences in rods growth at the edges of dielectric and metallic substrates have been demonstrated. Energy loss spectra have been recorded during rods formation and then analyzed. The obtained results have been ascribed to the accumulation of electrostatic charges on the formed structures.

PACS
6837L - Transmission electron microscopy (TEM) (including STEM, HRTEM, etc.).
8115J - Ion and electron beam-assisted deposition; ion plating.
6180F - Electron and positron radiation effects.
0778 - Electron, positron, and ion microscopes; electron diffractometers.

Key words
STEM -- Electron beam deposition -- Growth mechanism -- Nanostructures -- Molecular dissociation -- Electron energy loss spectra -- Carbon compounds -- Hydrocarbons -- Kinetics -- Electrostatic interaction -- Surface plasmons -- Beam currents -- Metallic substrates -- Dielectric substrates


© EDP Sciences 1992