Microsc. Microanal. Microstruct. 3, 313-322 (1992)
DOI: 10.1051/mmm:0199200304031300

Direct electron-beam-induced formation of nanometer-scalecarbon structures in STEM. - I. Nature of "long-range" growth outside the substrate

Vitalii V. Aristov, Nikolai A. Kislov et Igor I. Khodos

Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, 142432 Chernogolovka, Moscow District, Russia

Abstract
Long-range growth of carbon-containing structures beginning from the edge of the sample has been found to occur under the action of the electron beam passing outside the sample in the column of the microscope pumped down by an oil diffusion pump. The mechanism of the phenomenon is suggested.

PACS
6837L - Transmission electron microscopy (TEM) (including STEM, HRTEM, etc.).
8115J - Ion and electron beam-assisted deposition; ion plating.
6180F - Electron and positron radiation effects.
0778 - Electron, positron, and ion microscopes; electron diffractometers.

Key words
STEM -- Electron beam deposition -- Growth mechanism -- Molecular dissociation -- Hydrocarbons -- Surface reactions -- Excitation energy transfer -- Surface plasmons -- Electron impact excitation -- Nanostructures


© EDP Sciences 1992