Microsc. Microanal. Microstruct. 4, 127-135 (1993)
DOI: 10.1051/mmm:0199300402-3012700

A newly developed high resolution hot stage and its application to materials characterization

T. Kamino et H. Saka

Techno Research Laboratory, Hitachi Instrument Engineering Co. Ltd., 882, Ichige, Katsuta, Ibaraki 312, Japan

Abstract
This paper describes the newly developed specimen hot stage and its applications. The hot stage is designed for high resolution TEM image observation at high temperatures and EDX analysis at room temperature. A fine metal wire is employed as the heating element of the stage and battery is used as the heating power source. The hot stage is particularly useful for particle specimens. By using this novel stage, a HREM observation of Si at high temperatures (˜1400 °C) has been carried out. A dynamical observation of the surface of a PbTiO 3 particle during heating and its chemical analysis using EDX before and after heating are also carried out.

PACS
6837L - Transmission electron microscopy (TEM) (including STEM, HRTEM, etc.).
6172F - Direct observation of dislocations and other defects (etch pits, decoration, electron microscopy, x-ray topography, etc.).
8140G - Other heat and thermomechanical treatments.

Key words
TEM -- High-resolution methods -- Electron diffraction -- Hot stage -- Heat treatments -- Crystallization -- Chemical composition -- In situ -- Particles -- Silicon -- Lead titanates -- Si -- PbTiO3 -- O Pb Ti


© EDP Sciences 1993