Free Access
Microsc. Microanal. Microstruct.
Volume 6, Number 3, June 1995
Page(s) 289 - 320
Microsc. Microanal. Microstruct. 6, 289-320 (1995)
DOI: 10.1051/mmm:1995121

Microanalytical Imaging with Auger Electrons

Martin Prutton

Department of Physics, University of York, York YO1 5DD, UK

The detection of Auger electrons in a scanning electron microscope in order to form chemically specific images of the surfaces of solids is reviewed. The limits to sensitivity and spatial resolution are described and the current "state of the art" is summarised. Some of the useful image processing tools are reviewed and then a small set of applications of the technique when used for the study of surface segregation, semiconducting devices and archaelogy are described.

8280P - Electron spectroscopy for chemical analysis photoelectron, Auger spectroscopy, etc..
7920F - Electron surface impact: Auger emission.
6822 - Surface diffusion, segregation and interfacial compound formation.
6820 - Solid surface structure.
0130R - Reviews and tutorial papers: resource letters.

Key words
archaeology -- Auger effect -- reviews -- surface segregation -- surface structure -- Auger electrons -- microanalytical imaging -- scanning electron microscope -- surfaces -- review -- sensitivity limits -- spatial resolution -- surface segregation -- semiconducting devices -- archaeology

© EDP Sciences 1995