Free Access
Issue |
Microsc. Microanal. Microstruct.
Volume 6, Number 3, June 1995
|
|
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Page(s) | 289 - 320 | |
DOI | https://doi.org/10.1051/mmm:1995121 |
Microsc. Microanal. Microstruct. 6, 289-320 (1995)
DOI: 10.1051/mmm:1995121
Department of Physics, University of York, York YO1 5DD, UK
8280P - Electron spectroscopy for chemical analysis photoelectron, Auger spectroscopy, etc..
7920F - Electron surface impact: Auger emission.
6822 - Surface diffusion, segregation and interfacial compound formation.
6820 - Solid surface structure.
0130R - Reviews and tutorial papers: resource letters.
Key words
archaeology -- Auger effect -- reviews -- surface segregation -- surface structure -- Auger electrons -- microanalytical imaging -- scanning electron microscope -- surfaces -- review -- sensitivity limits -- spatial resolution -- surface segregation -- semiconducting devices -- archaeology
© EDP Sciences 1995
DOI: 10.1051/mmm:1995121
Microanalytical Imaging with Auger Electrons
Martin PruttonDepartment of Physics, University of York, York YO1 5DD, UK
Abstract
The detection of Auger electrons in a scanning electron microscope
in order to form chemically specific images of the surfaces of solids is
reviewed. The limits to sensitivity and spatial resolution are described
and the current "state of the art" is summarised. Some of the useful image
processing tools are reviewed and then a small set of applications of the
technique when used for the study of surface segregation, semiconducting
devices and archaelogy are described.
8280P - Electron spectroscopy for chemical analysis photoelectron, Auger spectroscopy, etc..
7920F - Electron surface impact: Auger emission.
6822 - Surface diffusion, segregation and interfacial compound formation.
6820 - Solid surface structure.
0130R - Reviews and tutorial papers: resource letters.
Key words
archaeology -- Auger effect -- reviews -- surface segregation -- surface structure -- Auger electrons -- microanalytical imaging -- scanning electron microscope -- surfaces -- review -- sensitivity limits -- spatial resolution -- surface segregation -- semiconducting devices -- archaeology
© EDP Sciences 1995