Free Access
Microsc. Microanal. Microstruct.
Volume 6, Number 3, June 1995
Page(s) 321 - 343
Microsc. Microanal. Microstruct. 6, 321-343 (1995)
DOI: 10.1051/mmm:1995124

The Role of Auger Electron Spectroscopy in the Semiconductor Industry

Derek K. Skinner

GEC-Marconi Materials Technology Caswell, Towcester, Northants NN12 8EQ, UK

The extremely demanding materials specifications of the electronics industry provides an interesting example of how Auger Electron Spectroscopy is now being put to work to provide valuable input into materials processing and device technology.

8280P - Electron spectroscopy for chemical analysis photoelectron, Auger spectroscopy, etc..
7920F - Electron surface impact: Auger emission.
2550 - Semiconductor device technology.

Key words
Auger effect -- electron spectroscopy -- semiconductor technology -- spectrochemical analysis -- Auger electron spectroscopy -- semiconductor industry -- materials specifications -- electronics industry -- materials processing -- device technology

© EDP Sciences 1995