Free Access
| Issue |
Microsc. Microanal. Microstruct.
Volume 6, Number 3, June 1995
|
|
|---|---|---|
| Page(s) | 321 - 343 | |
| DOI | https://doi.org/10.1051/mmm:1995124 | |
Microsc. Microanal. Microstruct. 6, 321-343 (1995)
DOI: 10.1051/mmm:1995124
GEC-Marconi Materials Technology Caswell, Towcester, Northants NN12 8EQ, UK
8280P - Electron spectroscopy for chemical analysis photoelectron, Auger spectroscopy, etc..
7920F - Electron surface impact: Auger emission.
2550 - Semiconductor device technology.
Key words
Auger effect -- electron spectroscopy -- semiconductor technology -- spectrochemical analysis -- Auger electron spectroscopy -- semiconductor industry -- materials specifications -- electronics industry -- materials processing -- device technology
© EDP Sciences 1995
DOI: 10.1051/mmm:1995124
The Role of Auger Electron Spectroscopy in the Semiconductor Industry
Derek K. SkinnerGEC-Marconi Materials Technology Caswell, Towcester, Northants NN12 8EQ, UK
Abstract
The extremely demanding materials specifications of the electronics
industry provides an interesting example of how Auger Electron
Spectroscopy is now being put to work to provide valuable input into
materials processing and device technology.
8280P - Electron spectroscopy for chemical analysis photoelectron, Auger spectroscopy, etc..
7920F - Electron surface impact: Auger emission.
2550 - Semiconductor device technology.
Key words
Auger effect -- electron spectroscopy -- semiconductor technology -- spectrochemical analysis -- Auger electron spectroscopy -- semiconductor industry -- materials specifications -- electronics industry -- materials processing -- device technology
© EDP Sciences 1995