Free Access
Microsc. Microanal. Microstruct.
Volume 2, Number 2-3, April / June 1991
Page(s) 315 - 332
Microsc. Microanal. Microstruct. 2, 315-332 (1991)
DOI: 10.1051/mmm:0199100202-3031500

Developments in EELS instrumentation for spectroscopy and imaging

Ondrej L. Krivanek, Alexander J. Gubbens et Niklas Dellby

Gatan Research and Development, 6678 Owens Drive, Pleasanton, CA 94588, U.S.A.

Recent developments in instrumentation for electron energy loss spectroscopy (EELS) at Gatan R&D are reviewed. A 10-channel intrinsic Si detector with single-electron detection capability is being developed for fast energy-filtered imaging and elemental mapping in the STEM mode. A new type of an imaging filter suitable for attachment at the end of the electron-optical column of a transmission electron microscope has been designed and built. The design of the filter is described, and its electron-optical properties are compared with the properties of an optimized Ω-filter. Finally, an unconventional design of an ultra-high resolution electron spectrometer which does not use any retardation and yet should be able to attain an energy resolution of a few meV at primary energies around 200 keV is proposed.

0781 - Electron and ion spectrometers.
6837L - Transmission electron microscopy (TEM) (including STEM, HRTEM, etc.).

Key words
EEL spectroscopy -- STEM -- Instruments -- Imaging -- TEM -- High resolution

© EDP Sciences 1991