Free Access
Microsc. Microanal. Microstruct.
Volume 2, Number 2-3, April / June 1991
Page(s) 359 - 366
Microsc. Microanal. Microstruct. 2, 359-366 (1991)
DOI: 10.1051/mmm:0199100202-3035900

Electron diffraction of amorphous thin films using PEELS

David Cockayne1, David McKenzie2 et David Muller1, 2

1  Electron Microscope Unit, University of Sydney, NSW 2006, Australia
2  School of Physics, University of Sydney, NSW 2006, Australia

In previous work, a method for obtaining accurate reduced density functions, G(r), from chosen small regions of amorphous and polycrystalline thin films was described. The method involves scanning an electron diffraction pattern across the entrance aperture of a serial energy loss spectrometer. The method has been further developed, using a parallel energy loss spectrometer, and using filtering techniques to obtain more accurate data at both large and small scattering angles.

6114 - Electron diffraction and scattering.
6143 - Disordered solids.
0781 - Electron and ion spectrometers.

Key words
Electron diffraction -- Amorphous material -- Thin film -- EEL spectroscopy -- Reduced density matrix -- Density function -- Polycrystal -- SEM -- Filtering -- Small angle scattering

© EDP Sciences 1991