Free Access
Microsc. Microanal. Microstruct.
Volume 2, Number 2-3, April / June 1991
Page(s) 351 - 358
Microsc. Microanal. Microstruct. 2, 351-358 (1991)
DOI: 10.1051/mmm:0199100202-3035100

Performance of a new high-resolution electron energy-loss spectroscopy microscope

Masami Thrauchi1, Ryuichi Kuzuo1, Futami Satoh1, Michiyoshi Thnaka1, Katsushige Tsuno2 et Junichi Ohyama2

1  Research Institute for Scientific Measurements, Tohoku University, Katahira 2-1-1, Aoba-ku, Sendai 980, Japan
2  JEOL LTD., Musashino 3-1-2, Akishima, Tokyo 196, Japan

We have been developing a new instrument for high resolution electron energy-loss spectroscopy (EELS). It is composed of a JEM-1200EX transmission electron microscope - the basic component - and two Wien filters (a monochrometer and an analyzer) with retardation lenses and acceleration lenses. The stigmatic focus has been achieved by a special design of the Wien filter. A spatial resolution of 190nm, and a momentum resolution (2π/λ) of 0.069Å -1 have been obtained. The energy resolution has attained so far to a value of 81 meV.

0781 - Electron and ion spectrometers.

Key words
EEL spectroscopy -- TEM -- High resolution -- Wien filters -- Performance analysis -- Aluminium -- Graphite

© EDP Sciences 1991